Senior Research Engineer ─ BEOL Furnaces, (APM), IME
Senior Research Engineer ─ BEOL Furnaces, (APM), IME
Job Details
Vacancies
1 position
Experience Required
No experience required
Job Description
We are looking for a motivated Research & Technical Support Engineer/Scientist to develop, maintain, and support BEOL furnace processes including BEOL metal anneal, barrier/liner engineering, dielectric curing, hydrogen anneals, and stress‑relief treatments. This role involves both fundamental materials science and hands‑on tool/process ownership in a cleanroom research environment. You will collaborate with R&D teams working on advanced interconnect technologies, photonic integration, 3D integration, and novel dielectric/metallization schemes.
Job Responsibilities:
BEOL Furnace Process Development
- Develop and optimize BEOL thermal processes including Metal anneal, Barrier/liner stabilization, Dielectric curing, Passivation and Stress‑relief anneals
- Perform tool qualification, recipe loading, chamber matching, SPC set up and contamination monitoring.
- Troubleshoot process excursions and ensure stable operations with high repeatability.
- Correlates anneal conditions with film quality, stress, adhesion, and reliability metrics.
Cross‑Functional Collaboration
- Work closely with teams in Photonic IC, Wide-Bandgap Devices, Packaging and reliability for process integration.
- Provide guidance for internal projects on thermal budgets, thermal‑stress implications, and BEOL process compatibility for novel materials and device architectures.
Job Requirements:
- Degree (Bachelor, or Master based on job scope) or above in Electrical Engineering, Materials Science, Mechanical Engineering, Chemical Engineering, Chemistry, Physics or related fields.
- 3 years of working experience in Semiconductor Fabrication is advantageous.
- Hands‑on experience with furnace processing, anneals, or BEOL‑related thermal steps is highly wanted.
- Knowledge of metallization physics, anneal passivation, interconnect reliability and dielectric curing.
- Understanding of thermal budget constraints and stress‑management in BEOL stacks.
- Hands-on experience in Design of Experiments (DOE), root cause analysis, and problem-solving methods is desired.
- Experience in Photonic IC, SiC devices, 2.5D/3D packaging and/or Wafer Bonding would be a plus.
- Proficiency with materials characterization tools, such as ellipsometry, XRD, XPS, TEM, SEM, stress measurement
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